电子级磷酸 85% 电子级

序号

分析项目

技术指标

级别1

级别2

级别3

1

h3po4

85.0—87.0%

85.0—87.0%

85.0—87.0%

2

no3，max

5ppm

5ppm

5ppm

3

so4，max

--

12ppm

12ppm

4

cl，max

1ppm

1ppm

1ppm

5

al，max

0.5ppm

300ppb

50ppb

6

sb，max

10ppm

3500ppb

1000ppb

7

as，max

0.05ppm

50ppb

50ppb

8

ba，max

--

--

50ppb

9

b，max

--

--

50ppb

10

cd，max

--

450ppb

50ppb

11

ca，max

1.5ppm

1100ppb

150ppb

12

cr，max

0.2ppm

200ppb

50ppb

13

co，max

0.05ppm

50ppb

50ppb

14

cu，max

0.05ppm

50ppb

50ppb

15

au，max

0.3ppm

150ppb

50ppb

16

fe，max

2.0ppm

700ppb

100ppb

17

pb，max

0.3ppm

300ppb

50ppb

18

li，max

0.1ppm

100ppb

10ppb

19

mg，max

0.2ppm

200ppb

50ppb

20

mn，max

0.1ppm

100ppb

50ppb

21

ni，max

0.2ppm

200ppb

50ppb

22

k，max

1.5ppm

450ppb

150ppb

23

si，max

--

--

50ppb

24

na，max

2.5ppm

500ppb

250ppb

25

sr，max

0.1ppm

100ppb

10ppb

26

ti，max

0.3ppm

300ppb

50ppb

27

zn，max

2.0ppm

400ppb

50ppb

28

particlesinbottles:

size,#/ml

≥1.0um,25max

≥0.5um,50max

≥0.5um,50max